中文摘要：

为实现某类MOCVD设备中衬底的自动化上下料,提出一款三自由度搬运机器人机构.通过对设计约束分析,建立了其D-H坐标系,推导出该机器人运动学正、逆解,并用Matlab进行验证.最后,在ADAMS中对所建立的机器人虚拟样机进行了搬运仿真,证明该机器人能实现衬底的自动上下料.

英文摘要：

To achieve certain types of automatic feeding and banking of the substrate in the MOCVD equip- ment, a transfer robot mechanism was made with three degrees. Through the analysis of the design constraints, estab- lishing a D - H reference frame, deduced the robot positive and inverse kinematics, and verification with Matlab. Fi- nally, ADAMS on the establishment of a transfer robot virtual prototype simulation proves that the robot can achieve automatic feeding and banking of the substrate.