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Study of He-induced nano-cavities as sinks of oxygen for forming silicon-on-insulator
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  • 相关项目：碳化硅中高能惰性气体离子注入对断裂韧性的作用机理研究
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碳化硅中高能惰性气体离子注入对断裂韧性的作用机理研究
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