中文摘要：

研究了利用钡、锶的碳酸盐代替醋酸盐作原料，采用新的Sol—gel技术制备Ba1-xSrxTiO3（BST）铁电薄膜的技术。采用碳酸钡、碳酸锶和钛酸四丁酯作原料配制BST溶胶；通过TG／DTA分析确定了BST薄膜的制膜工艺；使用XRD、SEM、AFM技术分析了薄膜的微结构。研究结果表明，采用碳酸盐作为钡、锶的原料，用冰醋酸和乙二醇甲醚混合液作溶剂，可配制出澄清透明、能长时间放置的溶胶，用此溶胶制备出了膜厚均匀、表面光洁致密、没有裂纹的全钙钛矿相的BST薄膜；采用扫描探针显微镜的压电响应模式（PFM）观察到了BST薄膜中的具有纳米结构的a畴和c畴。

英文摘要：

BST thin films were prepared through a novel Sol-gel process using the carbonates as the substitute of acetates. The starting materials were barium carbonate, strontium carbonate and titanium-tetrabutoxide. The crystal structure, surface morphology, grain size and the domain contrast of BST thin films have been investigated by X-ray diffraction （XRD）, scanning electric microscopy （SEM）, atomic force microscopy （AFM）, and piezoelectric force microscopy, respectively. The results show that the fabrication of the Sol-gel derived BST thin films can be carried out well by using carbonates of Ba and Sr as the starting materials and using the mixture of acetic acid and 2-methoxyethanol as solvent. As well, the as-prepared BST thin films are compact, continuous and possess completely perovskite structure. Nano-sized a-domain and c-domain were observed by using piezoelectric force microscopy （PFM）.