文中论述了渐逝场型光纤氢气传感器的传感结构和工作原理,并对传感头镀膜技术进行了仔细分析,由此确定出钯膜的最佳厚度以及膜厚控制方法。在此理论指导下,研制出渐逝场型光纤钯膜氢气传感器。经过气体浓度测试表明,氢气传感器输出的实验数据与理论分析结果符合较好,试验结果准确揭示了钯膜氢敏特性与膜厚的变化规律。
This paper discussed the configuration and theory of the fiber-optic evanescent-field hydrogen gas sensor;andanalyzed the plating-technology of sensororgan;thengot the optimum thickness of the pd-film and the way of thickness-control of the pd-film.Based on this theory,many hydrogen gas sensors weremade.In the experiments,the sensors give a figure which has the same change current with the theory figure;at the same time,the data of the experiments post the characteristic of different thickness of the pd-fil...