中文摘要：

为解决微结构功能表面的金刚石超精密加工过程中,难以经济而灵活地预测表面质量及加工条件对加工表面质量的影响的问题,以自行设计的带有快速伺服刀架的超精密机床为基础,采用Matlab/Simulink模块建立正弦波微结构功能表面金刚石超精密加工过程的动态仿真模型。利用该模型,不仅可以预测加工表面质量,还可以对加工条件如进给速度、主轴转速对加工表面质量的影响进行仿真进而对加工条件进行优化。通过微结构功能表面的金刚石超精密切削加工验证试验,加工出表面粗糙度约为45nm、形状精度约为0.65μm的正弦波微结构功能表面,试验结果表明,该模型的建立对于微结构功能表面的金刚石超精密加工具有重要的指导意义。

英文摘要：

In order to solve the problem of difficult prediction of the machined surface quality and the effects of machining conditions on cutting process in an economical and flexible way in ultra-precision diamond machining of microstructured surface. A dynamic simulation model for ultra-precision diamond machining of sine-wave microstructure is established. By using this model, one can not only estimate the surface topography and surface quality but also simulate the effect of cutting conditions such as the feed rate and spindle speed on the surface quality. The rerification test of the ultra-precision diamond machining of sine-wave microstructure is conducted, and a typical sine-wave microstructure with a form accuracy of 0.65 μm and surface roughness of 45 nm is manufactured. Test results show that the establishment of the dynamic simulation model has important guide significance to the machining of microstructures.