中文摘要：

利用Nd：YAG脉冲激光器冲击划痕物理气相沉积（PVD）工艺制备的无约束层的TiN薄膜涂层,研究涂层受冲击后残余应力状况,并分析冲击应力波对涂层结合强度的影响。研究表明,随着冲击划痕的激光功率密度逐渐增大,涂层表面原来的残余压应力显著减小,并在受激光冲击作用大的地方还产生了逐渐增大的残余拉应力;研究还表明,激光冲击涂层时产生的应力波对涂层的结合强度有明显的影响,当激光功率密度足够大时,产生的强大冲击应力波会导致涂层与界面间发生明显的翘起开裂和脱落。

英文摘要：

We studied the residual stress status and analyzed the effects of shock waves stress on interfacial binding strength of non-bounding layer TiN film coating made by physical vapor deposition（PVD） process,which was shock-scratched by Nd：YAG pulsed-laser.The results indicates the surface residual pressure stress of coating shock-scratched by laser with increasing power density is diminished significantly,and the gradual increscent residual tension stress is generated in the positions which are affected heavily by laser.In addition,the shock waves generated when coating is shock-scratched by laser have an obvious effect on interfacial binding strength,the strong shock waves can lead to the obvious warped,crazed and broken of interface between coating and substrate if the laser energy density is large enough.