中文摘要：

研究了压电微动机构非线性回滞的形成机理，建立了压电陶瓷电荷量与机械应变之间的数学表达式。为减小压电微动机构的非线性回滞环，采用电荷反馈控制方法对压电微动机构进行控制。实验结果表明，与传统的电压激励方式相比，采用电荷反馈激励方式，压电微动机构的回滞环减小了50%，线性度提高了35％。

英文摘要：

The formative fundamental of the inherent nonlinearity and hysteresis in the piezoelectric actuator was examined, and the mathematic relationships that relates actuator displacement to the amount of applied charge. In light of this, a charge-feedback control strategy was developed to activate the actuator for diminishing the nonlinearity and hysteresis. Experimental data from tests of voltage control and charge control shows that charge control is capable of reducing the hysteresis more than 50%, and improves the linearity by 35%.