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Layout Decomposition Co-optimization for Hybrid E-Beam and Multiple Patterning Lithography
  • ISSN号：0278-0070
  • 期刊名称：IEEE Transactions on Computer-Aided Design of Inte
  • 时间：0
  • 页码：-
  • 相关项目：成品率驱动的纳米尺度集成电路设计方法学研究
作者： Hai Zhou|Changhao Yan|Dian Zhou|Xuan Zeng|
同期刊论文项目
成品率驱动的纳米尺度集成电路设计方法学研究
期刊论文 30 会议论文 16 获奖 4
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