用磁控溅射技术在普通载玻片上制备了不同厚度透明的锐钛矿相二氧化钛(TiO2)纳米薄膜,利用X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)等分析方法对试样进行表征,并测试了其紫外可见透射光谱,计算了此薄膜的禁带宽度,其值接近TiO2禁带宽度的理论值3.2eV。
The anatase TiO2 nanofilms with different thickness were prepared by magnetron sputtering. Detailed structural characterization of the films were carried out using XRD, FE-SEM method. The films UV-vis spectrum of transmittance were measured and analysised. The optical energy band gap of the as-obtained nanofilms were calculated. The calculated optical energy band gap were close to the theoretical value with 3.2eV.