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FUNCTIONALIZED MESOPOROUS THIN-FILM DIRECTLY SELF-ASSEMBLED ON RESONANT-CANTILEVERS FOR BATCH-PRODUC
  • 所属机构名称：中国科学院上海微系统与信息技术研究所
  • 会议名称：24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
  • 时间：2011
  • 成果类型：会议
  • 相关项目：微纳流控系统跨尺度兼容一体化集成制造基础研究
作者： Yu, H. T.|Xu, P. C.|Xu, T. G.|Li, Xinxin|
同会议论文项目
微纳流控系统跨尺度兼容一体化集成制造基础研究
期刊论文 110 会议论文 41
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