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A SHIELDED CANTILEVER-TIP MICROWAVE PROBE FOR MICRO/NANO SURFACE IMAGING OF CONDUCTIVE PROPERTIES
  • 所属机构名称：中国科学院上海微系统与信息技术研究所
  • 会议名称：24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
  • 时间：2011
  • 成果类型：会议
  • 相关项目：微纳流控系统跨尺度兼容一体化集成制造基础研究
作者： Yang, Y. L.|Lai, K. J.|Tang, Q. C.|Kundhikanjana, W.|Kelly, M.|Shen, Z. X.|Li, Xinxin|
同会议论文项目
微纳流控系统跨尺度兼容一体化集成制造基础研究
期刊论文 110 会议论文 41
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