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Impurity engineering of czochralski silicon
  • 所属机构名称：浙江大学
  • 会议名称：13th International Autumn Meeting - Gettering and Defect Engineering in Semiconductor Technology, GA
  • 成果类型：会议
  • 相关项目：空间用掺锗硅单晶及器件的微缺陷研究
作者： Chen, Jiahe1|Ma, Xiangyang1|Yang, Deren1|
同会议论文项目
空间用掺锗硅单晶及器件的微缺陷研究
期刊论文 12 会议论文 5
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