位置：成果数据库 > 会议 > 会议详情页
Ultra flexible pseudo-lamb wave RF resonators based on ZnO/PI and AlN/PI structures
  • 所属机构名称：清华大学
  • 会议名称：2012 IEEE International Electron Devices Meeting, IEDM 2012
  • 时间：2012
  • 成果类型：会议
  • 相关项目：集成化射频高Q薄膜体声波谐振器
作者： Dong, S.R.|Yang, Y.|Shu, Y.|Zhang, C.H.|Tian, H.|Zhang, Z.H.|Xie, D.|Ren, T.L.|Zhou, J.|
同会议论文项目
集成化射频高Q薄膜体声波谐振器
期刊论文 38 会议论文 17 专利 17
同项目会议论文
Multilayer graphene growth by a metal-catalyzed crystallization of diamond-like carbon
Micromachined piezoelectric devices for acoustic applications
High-density PMUT array for 3-D ultrasonic imaging based on reverse-bonding structure
Effect of film thickness on properties of Al-doped ZnO film as transparent conducting electrodes in
Deposition of AlN thin films on flexible polymer substrates by magnetron sputtering and SAW device f
Flexible and large-area sound-emitting device using reduced graphene oxide
A High Order Mode 6.4GHz Ultra-High Sensitivity Nanoscale Surface Acoustic Wave Biosensor
Flexible Acoustic Wave Resonator for in-Liquid Biosensing Applications
Ultrasonic transducer array design for medical imaging based on MEMS technologies
Stopband RF Filter Based on FBAR
Effects of DC sputtering power on the properties of AZO films deposited at room temperature for CIGS
Whole chip ESD protection for 2.4 GHz LNA
Characteristics of Metal-Pb(Zr0.53Ti0.47)O 3-TiO2-Si capacitor for nonvolatile memory applications
FBAR Oscillator with temperature Compensation, 2nd International Conference on Nanomanufacturing
Integration of diamond-like carbon and AlN for acoustic wave devices
SAW based Mass-loading Biosensor for DNA Detection