By using microwave-assisted co-precipitation in aqueous phase, adding surface activation agent PEG-6000 into the mixture of InCl3 solution and SnCl4 solution, and dropping the ammonia solution with the density (volume ratio) of 1-0 to 1-4, ITO precursor was prepared at different reaction system temperatures of 35 ℃-85 ℃, then ITO nano-powder was obtained after it was calcinated at 800 ℃ for 1 h. The morphology of ITO nano-powder was characterized by SEM and its electrical conductivity was determined by conductivity meter. The effects of different temperatures and ammonia concentration in microwave-assisted reaction system on its morphology and electric conductivity were discussed. The experimental results indicate that with the dilution of the ammonia solution or the rise of reacting system temperature, the morphology of ITO particles is transformed from spherical to rod-like one with the decline of its electric conductivity. And the electric conductivity of ITO nano-powders with spherical morphology is higher than that of ITO nano-powders with rod-like morphology.