通过化学气相沉积法(CVD)合成出梳状分等级结构的ZnO纳米带,使用场发射扫描电子显微镜(SEM)和X射线衍射仪(XRD)对材料组成和结构进行了分析。利用这种材料制备了厚膜型管式气敏元件,并采用静态配气测试系统进行了气敏性能测试。测试结果表明,工作温度大约为225℃时,这种结构的材料对有机挥发性气体(volatileorganiccompounds,VOC)具有极快的响应和恢复速度,响应时间为2s,恢复时间为3s。最后分析了材料结构对气敏性能的影响。
The brush-like hierarchical ZnO nanobelts were successfully synthesized by a simple chemical vapor deposition method. The morphology and the structure were investigated by scanning electron microscopy and X- ray diffraction. Thick film type tubular device was prepared by this material and gas sensing properties of the sensor devices were measured in a static apparatus. The sensor performance of the brush-like hierarchical ZnO nanobelts was measured for volatile organic compounds at 225 ℃. It was found that the nanostructures exhibited excellent volatile organic compounds sensing properties, especially quite rapidly response and recovery. The re- sponse and recovery time are 2 and 3s. Furthermore, the effect of material structure on sensing properties was also investigated in this paper.