中文摘要：

在有限元模型基础上，运用 ANSYS软件对阴极真空电弧沉积系统中阴极表面磁场分布以及传输导管内部磁场进行了模拟计算，研究了阴极表面附近磁场分布对于电弧稳定性和等离子体输运效率的影响。计算和试验结果表明，调节阴极后部的永磁铁至合理位置以及在阳极筒外侧加聚焦线圈两项措施均能够改变阴极表面磁场分布。而对阴极表面磁场的合理优化有利于电弧稳定，并能极大地提高等离子体传输效率，对于提高沉积效率具有重要意义。

英文摘要：

Magnetic field distribution on cathode surface in a filtering cathode vacuum arc （FCVA）system as well as internal magnetic field in transmission duct were modeled and simulated with software ANSYS. Established finite element model was used to analyze effects of cathode surface magnetic field distribution on stability of electric arc and efficiency of plasma beam transport.Simulations showed that by adj usting the position of permanent magnet behind the cathode to an appropriate position and adding a focus coil outside the anode tube can both significantly improve magnetic field distribution on cathode surface. Reasonable optimization of magnetic field distribution on cathode surface is propitious to arc stiffness.It can greatly improve plasma transport and deposition efficiency.