中文摘要：

利用英国avantes公司生产的AvaSpec-2048FT-8-RM型光栅光谱仪对金属蒸汽真空弧（MEVVA）源产生的金属镍等离子体的发射光谱进行采集,并用＂Plasus Specline＂软件对采集到的数据进行分析,得到各条谱线所对应的元素及元素电荷态、跃迁能级及其能量等信息.同时采用多谱线斜率法对镍等离子的电子温度进行计算,并利用电子温度对等离子体的电子密度进行计算,从而实现MEVVA源产生的金属镍等离子体的发射光谱诊断.

英文摘要：

Nickel plasma was produced by an MEVVA ion source,its emission spectrum was collected in an AvaSpec-2048FT-8-RM platform fiber optic spectrometer.Element corresponding to each spectral line,element charge state,and transition energy level were all obtained using software ＂Plasus Specline＂ to analyze collected data.Electron temperature of nickel plasma was calculated by multiline slope method.Electronic density was calculated from a Saha equation,electron temperature was calculated as before.Emission spectroscopical diagnosis of nickel plasma produced by MEVVA ion source was therefore realized.