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The influence of film thickness and process temperature on c-axis orientation of Bi3TiTaO9 thin film
  • ISSN号：0928-0707
  • 期刊名称：Journal of Sol-Gel Science and Technology
  • 时间：0
  • 页码：271-276
  • 语言：英文
  • 相关项目：面向新型铁电DRAM的关键材料及MFIS界面特性研究
作者： Ren, Tianling|Zhang, Zhigang|Xie, Dan|Liu, Litian|
同期刊论文项目
面向新型铁电DRAM的关键材料及MFIS界面特性研究
期刊论文 13 会议论文 4 专利 3
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