中文摘要：

真空的获得和维持是目前MEMS真空封装技术中存在的主要难题之一。实验利用具有高比表面积和自身储气特性的碳纳米管（CNTs）作为骨架,制备一种能在高真空环境（〈10-3Torr,分子状态）和低温（〈400℃）下吸收活性气体的新型吸气剂——纳米吸气剂。与传统吸气剂意大利SAES公司的St175相比,在500℃下激活10min后,室温下,单位质量的纳米吸气剂吸气速率约是St175的1000倍;而带温（320℃）下测试,约是St175（750℃下激活10min后冷却至400℃下测试）的20倍。

英文摘要：

The vacuum obtains and maintenance is still still the main problem in the field of MEMS vacuum packaging technology. In this paper a novel getter, we call it nanogetter, based on carbon nanotubes （CNTs） with large surface area ratio and native gas adsorption is prepared to fabricate a novel getter, which is capable of getting active at high vacuum environment （ 〈 10^-3Torr, molecular state） and low temperature （ 〈400℃）. The pumping speed of unit -weight nanogetters is up to 1000 times greater than St175 at room temperature after activation at 500℃×10min, and nearly 20 times as large as St175 at 400℃ after activation at 750℃× 10min.