中文摘要：

振动梁式微机械隧道陀螺仪是一种以悬臂梁作为换能构件,以电子隧道效应为输出敏感方式的高精度和高灵敏的角振动传感器,解决了传统机械陀螺仪因尺寸减小而导致的灵敏度降低的缺点。结合微机械隧道陀螺仪的尺寸特点：硅尖与下电极的距离为1μm,齿厚和齿间距之间的距离为4μm,梁的厚度为50μm,提出硅正面刻蚀—玻璃上电极制作—硅玻键合—硅背面减薄—硅背面刻蚀的DDSOG（Deep Dry Silicon On Glass）工艺方案,成功实现了整个器件的工艺制备。本文就DDSOG工艺中的关键工艺进行了一一论述,该工艺不仅能用于隧道陀螺仪的制备,同时也可以制作其它高深宽比传感器或执行器。

英文摘要：

Micro-machined tunneling gyroscope with cantilever is a kind of angular rate sensor with high sensitivity and resolution, in which cantilever works as transducer and electron tunneling effect is employed as sensor. It overcomes the traditional one＇s reduction in sensitivity when miniaturized. The Deep Dry Silicon On Glass （ DDSOG ） process , which includes the silicon front side etching , the technology of electrodes on the glass, the wafer bonding, the silicon thickness reduction and silicon deep etching on the back side, has been introduced to fabricate the microgyroscope based on its dimension characteristics： 1μm gap between silicon tip and its underside electrode, 4μm finger gap and width, 50μm thickness of cantilever. This process can be used to fabricate not only the micro-machined tunneling gyroscope but also other sensor and actuators.