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中文摘要：
驻极体微型发电机是近期提出的微电子机械系统开发中的一个新领域,驻极体电荷稳定性则是影响驻极体微型发电机性能的关键。用等离子体增强化学气相沉积（PECVD）方法制备SiO2/Si3N4双层膜,采用电晕充电和热极化方法对材料进行注极形成驻极体,探讨了器件加工工艺及存储环境对双层膜驻极体电荷稳定性的影响。结果表明,电晕充电后SiO2/Si3N4双层膜的电荷存储稳定性明显优于SiO2单层膜;传统的电晕注极方法仅适用于大面积驻极体的制备,但对微米量级的材料表面不适用;微器件制备的工艺流程对驻极体电荷稳定性有显著影响,但存储环境对热极化驻极体电荷稳定性的影响很小。
英文摘要：
Electret micro-generator is a new research field in micro electro mechanical system.The charge stability of electret is the key to its working capability.In this paper the Si3N4/SiO2 double layer film and SiO2 single layer film were prepared by means of plasma enhanced chemical vapor deposition（PECVD） and charged with corona and thermal charging.The effects of manufacturing processes for micro-machining manufacture on electret charge stability were investigated with surface potential decay measurement.The results show that corona charged Si3N4/ SiO2 double layer film has higher charge stability than SiO2 single layer film.Corona charging method is not available for the charging of micron measurement films.The effect of storage environment on the thermal charging electret stability is minor.
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