中文摘要：

提出一种快速制作聚二甲基硅氧烷（Poly（dimethylsiloxane）,PDMS）微流控芯片复型模具的新方法,并对其制作工艺进行研究。以液体光刻胶为模具材料,在液态下通过紫外光曝光使光刻胶固化而形成模具微结构。在整个制作过程中不需要对液体光刻胶进行烘烤,与目前使用较多的以SU-8光刻胶（一种负性环氧型光刻胶）为模具材料的制作方法相比,不仅简化制作工序,大大缩短制作时间,且避免加热产生的内应力导致的结构变形。该方法不需要昂贵的制作设备,所用原材料成本低廉。试验结果表明,所制作的模具微结构侧壁陡直、表面光滑,最大深宽比达5.7,在对PDMS材料的复型试验中获得良好的形状和尺寸精度。

英文摘要：

A new method for rapid fabricating masters of PDMS（polydimethylsiloxane）-based microfluidic devices is presented and the corresponding process is studied. Liquid phase photoresist is adopted as the material of masters, which can be cured to form microstructures by UV exposure under liquid phase. Baking liquid phase photoresist is eliminated during fabricating process. Compared with the current methods that mostly use SU-8 photoresist as the masters material, the method presented can not only simplify the fabricating process but also shorten the fabricating time sharply and avoid distortion caused by the baked internal stress, which doesn＇t need expensive equipment and can reduce the material cost. The experimental results show that the masters microstructures have the characteristics of nearly vertical sidewalls and smooth surfaces, whose maximum aspect ratio can reach 5.7. The PDMS microstructures replicated demonstrate a desirable precision in shape and dimension.