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中文摘要：
提出了一种新型的MEMS压阻式加速度传感器，该传感器采用“四悬臂梁-质量块”结构，16个压敏电阻完全对称布放于悬臂梁上应力变化的线性区，既提高了传感器的灵敏度，又降低了轴间耦合度和非线性度。通过与八悬臂梁结构的仿真对比，得出该传感器具有更高的抗横向耦合性，约为八悬臂梁结构的30倍。
英文摘要：
A new type of MEMS piezoresistive acceleration sensor is put forward. The structure of this sensor is ＂4-beam/mass＂ with completely symmetric distribution of 16 varistors in the stress linear region of the beam. The advantages of this structure are that the sensitivity of the sensor is improved, and the cross-axis couple degree and non-linearity are decreased. Compared with the sensor with ＂8-beam/mass＂ structure, it can be concluded that this acceleration sensor has larger anti-lateral-coupling degree, which is about 30 times higher than that of ＂8-beam/ mass＂ structure.
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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS techno
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