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中文摘要：
氧化锆功能陶瓷因其稳定的物理特性、机械韧性和高温鲁棒性得到了广泛的应用。从非接触无源信号测试技术的基础研究出发,以LC无源谐振电路为技术背景,提出了采用氧化锆流延生带来实现MEMS压力微结构的设计方案,并通过利用陶瓷生片叠片工艺技术和厚膜印刷技术成功制备了压力传感器。根据电感耦合原理实现了传感器的非接触环境压力测试,通过在最大耦合距离为1 cm的条件下测试获得的压力传感器的灵敏度为7.5 MHz/bar。本传感器有效避免了微器件封装、引线外联的问题,从而为以后压力传感器应用在较高温度环境奠定基础。
英文摘要：
Zirconia functional ceramic has wide applications with its stable physical characters,mechanical toughness and high temperature robustness.Based on basic research on non-contact passive signal measurement technology,pressure LC passive circuit is used as technical background.Design scheme of MEMS pressure micro-structure is realized by ZrO2 casting belt,by adopting ceramic green sheet technology and thick film printing technology,pressure sensor is fabricated.Non contact environmental pressure test is realized according to inductive coupling theory.The sensitivity of pressure sensor is 7.5 MHz/bar at max coupling distance 1 cm.The problem of micro-device packaging and lead out reach can be avoided,thus lay the foundation for pressure sensor used in high temperature environment in the future.
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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS techno
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