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中文摘要：
在复杂制造及自动控制领域,半导体生产调度一直是研究的热点.半导体生产制造系统因其特有的复杂性、不确定性、多目标性以及多约束性特征,为优化调度、提高生产性能提出了挑战.信息物理融合系统（Cyber Physical System,CPS）是一种融合计算、通信与控制的新型复杂实时分布式系统,系统中计算过程和物理过程在开放环境下持续交互、深度融合,其特征和功能为离散制造的智能化生产和竞争力的提高提供了有效的思路和途径.本文基于信息融合系统的基本理念,结合其在制造业的应用发展,探讨了针对于半导体生产的CPS构建以及进行调度优化的可行性.
英文摘要：
in the feld of complex manufacturing and automatic control, scheduling of semiconductor production has been a research hotspot. Because of its complexity, uncertainty, multi-objective and multi constraint characteristics, semiconductor production and manufacturing system has been bringing challenges to optimize scheduling and improve production performance. Cyber physical system（CPS） is a new type complex real-time distributed system combined with computing, communication and control, in which calculation and physical process is continuously interacted and deeply integrated under open environment. Characteristics and functions of CPS provide effective thought and way to improve intelligent manufacturing and competitiveness of discrete manufacturing. Based on basic concept of information fusion system and combined with application and development in manufacturing industry, the article discussed CPS construction and feasibility of optimizing scheduling aiming at semiconductor production.
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