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Toughness Characteristics of Arc-Enhanced Magnetron Sputtered SiCN Hard Films
  • ISSN号：0267-0844
  • 期刊名称：Surface Engineering
  • 时间：0
  • 页码：357-371
  • 语言：英文
  • 相关项目：Si-C-N超硬薄膜韧化途径与机制探索
作者： Yanfeng Wang|Shengli Ma|Paul K Chu|
同期刊论文项目
Si-C-N超硬薄膜韧化途径与机制探索
期刊论文 21 会议论文 1 专利 2
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