中文摘要：

半导体激光器结温度的测量对于其温度控制和特性研究非常重要。基于对激光器的结构和热电等效模型的研究，建立半导体激光器组件中激光器芯片和热敏电阻的数学模型，利用热敏电阻实时监测激光器在热动态过程中的结温度。以气体吸收谱线的波长验证了模型的正确性，实现激光器结温度预测不确定度约为0．01K。还利用此方法测量了电流调谐过程中动态结温度，在一个锯齿电流扫描周期内结温度变化量为0．044K。基于热敏电阻预测激光器结温度无需附加额外测量装置，其精度不受环境温度和TEC电流的影响，适合于原位、在线激光系统，也可应用于激光器组件热学性能的研究。

英文摘要：

The junction temperature measurement of laser diode （LD） is very important in its temperature control and thermal characteristic study. Based on the study on the structure and thermal-electric equivalent circuit model of laser diode module （ LDM）, a mathematic model of the laser chip and thermistor in the LDM is established. The dynamic junction temperature can process. The model is validated be monitored using the thermistor integrated in with indirect temperature measurement through the LDM during thermal dynamic monitoring the emission wavelength of the laser diode using gas absorption lines. The uncertainty of the estimated dynamic junction temperature of laser diode is about 0.01 K. The dynamic junction temperature during current tuning process is measured as well, and the junction temperature variation in a sawtooth current scan cycle is 0. 044 K. While using thermistor to estimate the junction temperature of laser diode, the estimation accuracy is immune of the disturbance of ambient temperature and injection current in various thermal dynamic processes. The method requires no additional devices and is suitable for in situ, on-line laser diode applications. It can also be applied to study the thermal properties of laser diode module.