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A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：0
  • 页码：115001-115001
  • 语言：英文
  • 相关项目：基于细胞自组装的集成化芯片系统研究
作者： Xi, Jianzhong|Li, Zhihong|Ji, Xu|Wang, Yangyuan|Li, Juan|
同期刊论文项目
基于细胞自组装的集成化芯片系统研究
期刊论文 19 会议论文 12
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