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Parylene film for sidewall passivation in SCREAM process
  • ISSN号：1006-9321
  • 期刊名称：Science in China Series E-Technological Sciences
  • 时间：0
  • 页码：357-362
  • 语言：英文
  • 相关项目：基于细胞自组装的集成化芯片系统研究
作者： Ji Xu|Yu HuaiQiang|Li ZhiHong|Huang XianJu|Lei YingHua|
同期刊论文项目
基于细胞自组装的集成化芯片系统研究
期刊论文 19 会议论文 12
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