中文摘要：

紫外光清洗技术是液晶显示器生产过程中的一项重要工艺，同时也是一种有效保障COG制程中良品率的技术手段。本文解释了紫外光清洗的工作原理，从LCD企业的生产实际出发，通过一系列的实验对VUV和E—UV两种紫外光清洗技术的清洗效果进行了对比，并选择出了最佳的E—UV清洗工艺；然后对E—UV清洗的照射时间、照射功率以及照射距离等参数进行了优化，得到了最佳工艺参数；最终企业的量产实验印证了E—UV清洗最佳优化参数的正确性。

英文摘要：

The technology of ultraviolet rays cleaning plays an important part in the whole process of LCD production, and is also an effective measure to insure the yield rate of productions during the process of COG. In this paper, the working principle of Ultraviolet Rays Cleaning is explained at first; From the manufacture practice, two kinds of Ultraviolet Rays Cleaning are contrasted by a series of experiments, and a better cleaning technology - E-UV Cleaning is chosed. Finally a few parameters of E-UV Cleaning are optimized, and the optimum parameters are acquired, the rationalities of which are approved by the practical productions in the end.