针对工作在涵盖甚长波段的碲镉汞红外探测器,设计较薄的光学膜层或光学结构实现反射率低于10%的减反效果,分为减反膜系和类光子晶体两种设计。基于光学薄膜理论设计并分别用两种算法优化得到了3层和4层ZnS/YbF3增透膜。经过模拟计算,设计的减反膜在8~16μm的宽光谱波段范围内能大幅度减少红外探测器表面的反射,平均反射率低于5%,并且在0°~60°入射角范围内都具有明显的减反效果。另外,通过类光子晶体的周期性纳米柱结构设计,得到了在14~16μm波段平均反射率低于5%的设计方案。两种方案提供了不同思路的甚长波减反设计,减反膜系相对简单廉价,易于大规模生产;类光子晶体设计,生产技术要求较高,但性质更加稳定可靠。
To reduce reflection of the HgCdTe detector at very long wavelength( 〈10%),the design of the antireflective films and the antireflective array was reported.Based on thin film theory and two kinds of optimization algorithms,two kinds of results were calculated,they were three layers or four layers ZnS/YbF3 thin films.The antireflective films we designed reduce the reflection( 〈5%) in a wide wavelength(8 ~ 16 μm) and large incident angles(0 ~60°).What's more,we also designed nanorod array as another method,it also has a low reflection(〈5%)at very long wavelength(14 ~ 16 μm).For two methods,the thin film method is cheap and easy to put into production;the nanorod array method gets better stability but requires higher techniques.