中文摘要：

原子力显微镜（Atomic Force Microscope,AFM）是纳米科技研究领域的一种重要工具。作为一种近场成像仪器,参数的选择对样品成像的效果有着很大的影响,不当的参数甚至可能造成样品的损坏。通过采用控制变量法,并以均方根粗糙度作为评判标准,改变AFM各项扫描参数,研究了AFM中不同参数的调整对于样品扫描图像的影响。结果表明,振幅阈值、扫描速率、积分增益三项参数对于测量样品表面粗糙度均有较大影响,通过适当改变扫描参数,可以有效提升AFM的样品扫描质量。

英文摘要：

Atomic Force Microscope （AFM） is a very important tool in nanoleehnology research. As a near fiehl image system, the seanning parameters have a huge eleel on the quantily of sample image. Improper scanning paramelers may even hurt the sample. In this paper, the control variable method was introduced in changing the scanning parameters, and the RMS （root mean square） roughness was used as criteria. The effect of different parameters on the sample image was studied and summarized. The results show thai the amplitude setpoint, scan rate, integral gain have great impact on the measurement of the sample st,rfaee roughness. The image quality could be improved by changing the scanning paranieters properly.