中文摘要：

研制了Y分支平面波导型光分路器,采用半导体工艺制备了1×8平面光波导芯片,经过耦合对准和黏接完成了芯片的封装.对研制的平面波导型光分路器在1 270～1 570 nm波长范围内的插入损耗进行了测量,在该波长范围内插入损耗曲线较平坦.这表明平面波导型光分路器的插入损耗在所测试波段对波长不敏感,而熔融拉锥型光分路器的插入损耗曲线表现出明显的窗口限制.同时对1 310、1 550 nm处8个输出口的传输特性进行了表征,偏振相关损耗都小于0.05dB,而回波损耗均大于50 dB.结果表明,PLC光分路器具有良好的传输性能.

英文摘要：

A Y-branch planar lightwave circuit （PLC） optical splitter was fabricated using semiconductor process,in this paper.The optical waveguide chip was packaged by coupling alignment and adhesion after fabrication.The insert loss of the 1 × 8 Y-branch planar lightwave circuit optical splitter was measured in the operation wavelength from 1 270 nm to 1 570 nm.The insert loss curve is almost flat,which indicates that the PLC splitters are insensitive to wavelength in the test range.However,the insert loss curve of fused biconical tapered optical splitter presents obvious windows restriction.Meanwhile,the polarization dependent loss and return loss of 8 output ports are less than 0.05 dB and larger than 50 dB in the wavelength of 1 310 nm and 1 550 nm,respectively.The results show that the PLC splitters have high transmission efficiency.