中文摘要：

提出一种由压电晶片驱动的新结构微型泵，选用悬臂梁式单向阀，并采用迭片技术。在实验室中设计、制作了实验样机，其中重要件如泵体和金属单向阀片均通过精密机械加工工艺制作而成。通过系统的实验测试和研究得出了许多有益的实验结果：工作性能稳定，整机具有较高的体积功能比（样机尺寸：Ф15mm×1．8mm；50V正弦信号输入，80Hz条件下，流量达到3．6mL／min，最大输出压力22kPa；微泵的自身泵送频率fsp达到12．4）。同时也提出了利用多腔体串联结构提高压电泵性能的优化设计方案。设计方法及所用制作工艺对研发适于大量生产的实用微型泵是一个有益的尝试。

英文摘要：

It presents a novel micropump actuated by the piezoelectric wafer, which is assembled with the lamination technique, and adopts the cantilever check valve. In the laboratory the pump prototype has been designed and manufactured, the main parts such as the pump body and metal check valve were fabricated by precision machining process. And the systemic experiment research and test also have been done on the micropump. Through a series of tests, many beneficial conclusions have been drawn： the micropump possesses the stable work performance and owns higher ratio of performance to volume （the apparent dimension of pump： Ф15mm×1.8mm, with a sine wave driving voltage of 50V（at 80Hz）, the fabricated micropumps have been able to provide flow rates up to 3.6mL/min and back pressures up to 22kPa, the self-pumping frequency fsp reaches 12.4）. Finally the optimization project of the micopump also has been put forward, which adopted the mutichamber series connection structure to improve the performance of mieropump. The structure and manufacture processing of the micropump is useful to the design and development of the applied piezoelectric micropump which is suitable for mass fabrication.