中文摘要：

设计了两种形式的被动截止薄膜阀-整体开启阀与悬臂梁阀，对两种形式阀的过流特性进行了理论分析，并应用两种形式的阀体制成了双腔串联压电泵的样饥。对样机的实验测试表明，整体开启阀压电泵的自吸能力和输出流量都要好于悬臂梁阀压电泵。在200v交流电压驱动下，前者的最大自吸高度和输出流量分别为430mm水柱和972ml／min，而后者为410mm水柱和480ml／min。

英文摘要：

The flow performance characteristics of two check valves, the holistic opening valve and the cantilever valve, were investigated. The prototype of piezoelectric pump with double series-wound chambers was manufactured in two form valves. The experimental results show that the self-suck ability and output flux of the piezoelectric pump with holistic opening valve are better than the piezoelectric pump with cantilever valve. With the alternating current of 200 V, the maximum self-suck height of the formers is 430 mm water column （the pressure is about 43 kPa）, and the maximum output flux is 972 ml/min, the counterpart value of the latter piezoelectric pump is 410 water column and 480 ml/min, respectively.