中文摘要：

对单腔体压电叠堆泵进行了结构设计，并制作了实验用样机。分析了阀的工作原理，在阀体选择上选用了一种简单的薄膜阀。设计了正弦信号发生器电路，将产生的正弦信号经过电压放大和功率放大后，作为该泵的电源驱动，并对该泵的工作性能进行较为系统的实验测试和研究。实验测试表明：该泵工作性能稳定，其流量的最佳工作频率约为25Hz，输出压力的最佳工作频率约为7Hz。

英文摘要：

The structure of single-chambered piezoelectric stack pump was designed, the prototype pump was manufactured and its working principle was analyzed. A simple membrane valve was used, the sine wave signal forming schematic circuit was designed, the sine wave signal after power amplification and voltage amplification was used to drive the pump. The experimental result shows that the pump possesses stable work performances, the best working frequency of flow rate and backpressure is about 25Hz and 7Hz respectively.