中文摘要：

以一种体微加工技术制备的音叉振动式微机械陀螺为研究对象，从参数化设计的角度详尽分析了加工误差引起的两个关键参数（检测弹性梁的弹性系数和检测质量块的质量）的性能变异对最终检测电容的影响。通过动力学分析，获得了系统固有频率以及检测总电容的解析表达式。根据电容幅频特性分析，获得了对微陀螺性能影响最大的两个关键参数，并针对这两个关键参数相应提出了合理化设计及加工的建议。提出了保证微陀螺性能的关键在于保证音叉振动式微陀螺左右部分的对称性这一观点。试验结果证明了仿真分析的正确性。研究结果明确了关键参数的变异对微陀螺性能的影响。

英文摘要：

This paper focused on a tuning fork vibratory mieromachined gyroscope which was fabricated through silicon bulk microprocessing technology. From the view of the parametric design, we analysed the effects of the key parameters on performance variation caused by fabrication errors for final detection capacitance. The equations of natural frequency and total detection capacitance were obtained by the dynamical analysis for this gyroscope. Two key parameters which affect the performance greatly are achieved with the analysis of the amplitude frequency response of opposite-and inphase- direction-detection capacitance and useful recommendations for the design and the fabrication are consequently suggested. The experimental results have good agreement with the simulation ones. The symmetry of the left and right structure of the gyroscope is very important for the performance of the gyroscope. The work herein presents the effects of key parameters variation caused by fabrication errors on performance of the gyroscope, and has an important reference theoretical basis for further performance improvement of the gyroscope.