中文摘要：

以一种音叉振动式微机械陀螺为研究对象，建立了四自由度微机械陀螺动力学模型，重点分析了驱动微弹性梁和检测微弹性梁刚度较大方向的微弹性系数对微机械陀螺动力学性能的影响。设计了三段检测梁和两段驱动梁并推导出其微弹性系数公式，建立了微弹性梁的评价函数，通过实例解析对微机械陀螺动力学性能进行了优化。结果表明：优化后的微机械陀螺具有较好的健壮性和较高的灵敏度。此研究结果适用于音叉式微机械陀螺，而且对其它MEMS器件的设计具有重要的参考价值。

英文摘要：

This paper presents a four-degree-of-freedom microgyroscope dynamical model based on a tuning fork vibratory gyroscope, and reports the investigation of the effects of the driving micromachined spring beam and sensing micromachined spring beam on the microgyroscope performance. Two new types of micromachined spring beams, named the three-sect sensing spring beam and the two-sect driving spring beam, were designed and their stiffness equations were deduced. The function for evaluation of micromachined spring beams was established and the dynamic performance of microgyroseopes was optimized by a practical analysis example. The optimization result showed that the optimized gyroscope had the good robustness and high sensitivity. The result is suitable for tuning fork vibratory microgyroscopes, and can provide reference data for design of other micro-electro-mechanical systems.