中文摘要：

为了解决微机电系统模型重复利用性差以及其仿真精度与计算时间的矛盾,针对微机电系统结构工作原理相似的特点,提出了面向对象的微机电系统结构设计方法.将大自由度微机电系统结构按其工作原理划分为参数化的小自由度对象,对象互相联系实现器件功能.相比于传统有限元方法,对象底层数学模型着重基于对象的功能建模和工作环境中状态的迁移原则,对象模型计算速度快且易于修改,可自由搭配重复使用.以1种音叉式微陀螺为例构造其对象模型,基于Simulink进行了时域和频域的仿真,实现了较好的解析精度和速度.

英文摘要：

This study is aimed to resolve such impacts on MEMS modeling as low reusability and conflict between simulation precision and computation time. Pertaining to the similarity among MEMS models, an objectoriented MEMS design methodology is first proposed. With regard to working principles, the high DOF MEMS is accordingly decomposed into low degree of freedom（IX）F） parameterized objects so as to realize device functionalities. Compared with traditional finite element methods, the low-level object mathematical models are established based on functional modeling and state transformation rules. In this manner, the object models possess high speed of computation, ease of modification and convenience of reusability. Finally, a case study on a tuning-fork-typed gyroscope is used to construct relevant object models. To this end, the time-and frequency-domain simulations are conducted using Simulink^TM to attain higher analytical precision and speed.