中文摘要：

为了提高柔顺机构的操作精度和工作性能，需要对其频率特性进行研究．基于有限元方法，建立柔顺机构的动力学方程，得到系统各阶固有频率和模态．并在此基础上，给出了机构固有频率灵敏度的计算方法．算例结果表明，柔顺机构频率特性与各设计参数间存在着特有的内在关系，最后说明了该方法对柔顺机构频率特性分析的可行性和有效性．

英文摘要：

To improve the performance and operation accuracy of compliant mechanisms, a lot of work needs to be done to further the study of frequency characteristics analysis of compliant mechanisms. The dynamic equation of compliant mechanism based on the finite element method is developed, and the natural frequencies and modes are derived at first. A method for calculating the sensitivity of natural frequency is then presented. The numerical example result shows that the design parameters have impact on the frequency characteristics of compliant mechanisms, and also indicates that the method for frequency characteristics analysis of compliant mechanisms is effective and efficient.