中文摘要：

针对顶面驱动可变电容式静电微电机的参数优化设计问题，建立了一般解析物理描述模型，并给出了优化问题的数学模型。在考虑电机结构尺寸和电机控制方法优化的同时，结合数值积分方法和遗传算法，提出一种简单高效的优化设计方法，并通过有限元分析对提出的方法进行了有效性验证，实现了静电微电机的快速优化设计。

英文摘要：

A new optimization method of motor torque was proposed in this paper, to solve the parameter optimization design of the topdrive variable capacitive electrostatic mieromotor. According to physical model ofthe mieromotor, the mathematical model for optimization problems was build. Based on genetic algorithmsand the numerical integration calculation, a fast optimization method was proposed concerned with the parameter of the micromotor and its excitation schemes. The finite element analysis shows the proposed methodis effective to optimal design of the electrostatic micromotor. This method can be also used in the optimizationdesign of other types of salient pole electrostatic micromotor.