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Structure, optical properties and thermal stability of HfErO filmsdeposited by simultaneous RF and V
  • ISSN号：0947-8396
  • 期刊名称：Appl. Phys. A
  • 时间：2015.1.23
  • 页码：-
  • 相关项目：螺旋波等离子体特性及与材料相互作用基础研究
作者： H. Y. Zhang ? H. J. He ? Z. Zhang ?|
同期刊论文项目
螺旋波等离子体特性及与材料相互作用基础研究
期刊论文 19 会议论文 8 著作 1
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