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Synthesis of Few-Layer Graphene-on-InsulatorFilms by Controllable C4F8 Plasma Etching SiC
  • ISSN号：1612-8850
  • 期刊名称：Plasma Processes and Polymers
  • 时间：2015
  • 页码：1061-1068
  • 相关项目：螺旋波等离子体特性及与材料相互作用基础研究
作者： Chenggang Jin,* Tianyuan Huang, Yan Yang, Mingzhi Wu, Yijun X|
同期刊论文项目
螺旋波等离子体特性及与材料相互作用基础研究
期刊论文 19 会议论文 8 著作 1
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