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Effect of Multiple Frequency H2/Ar PlasmaTreatment on the Optical, Electrical, andStructural Propert
  • ISSN号：0093-3813
  • 期刊名称：IEEE TRANSACTIONS ON PLASMA SCIENCE
  • 时间：2014.12
  • 页码：3687-3690
  • 相关项目：螺旋波等离子体特性及与材料相互作用基础研究
作者： Mingzhi Wu, Tianyuan Huang, Chenggang Jin, Lanjian Zhuge, Qin|
同期刊论文项目
螺旋波等离子体特性及与材料相互作用基础研究
期刊论文 19 会议论文 8 著作 1
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