中文摘要：

针对时栅位移传感器在测量过程中存在低次误差的问题，分析了激励信号源误差对时栅测量精度的影响。为提高时栅位移传感器的测量精度，设计了一种基于闭环控制的高精度激励信号源。对两相激励信号进行数据采集，计算相位差及比较幅值，并将处理结果反馈到激励信号数据源，控制其相位和幅值，以满足两相激励信号的幅值相等及相位正交。试验结果表明，这种基于闭环控制的方案提高了激励信号源的精度，从而使时栅的测量精度提高了30％。

英文摘要：

For low error problem of time-grating displacement sensor in the measuring process,analysis the effects of the excitation signal source of uncertainty on the time-grating measuring accuracy, in order to improve the precision of time - grating displacement sensor, design the high precision excitation signal source based on closed loop control. Through the two - phase excitation signal for data acquisition, calculation of phase difference and amplitude comparison, processing and result feedback to the excitation signal data source, control the phase and amplitude, in order to meet the two-phase excita- tion signal of equal amplitude and phase orthogonal. The experimental results show that this scheme based on closed loop control improves the precision of the excitation signal source, and on the basis of this, the measuring accuracy of the time- grating is increased by 30%.