中文摘要：

传统时栅位移传感器采用线切割机床加工定、转子,线切割机床主要靠电火花的瞬时高温使局部金属腐蚀加工齿轮,导致加工效率低,齿距等分性差。然而,齿距等分性在一定程度上影响着传感器的测量精度。研究齿轮的齿距误差对传感器测量精度的影响,通过精密插齿工艺与线切割加工工艺下的齿距等分实验,可知前者的齿距等分性好于后者,比较两者的精度检定实验,可知精密插齿加工工艺的传感器精度优于线切割加工工艺的传感器精度±0.6″。

英文摘要：

Traditional time-grating displacement sensor processes stator and rotor using EDM machining, which mainly makes use of instantaneous high-temperature of the electric spark to corrode the local metal ,resulting in low processing effi- ciency and poor pitch aliquot. However, an aliquot of the pitch, to some extent, affects the measurement accuracy of the sen- sor. The effect of gear＇ s pitch error on measurement accuracy of the sensor is studied, and the related pitch aliquot experi- ments, which include precision gear shaping technology and wire cutting technology are carried out. The results show that the pitch aliquot of the former is better than that of the latter, and confirm that the sensor accuracy of the former is superior than that of the latter ±0. 6″.