中文摘要：

时栅位移传感器测量数据显示，其误差存在明显的高次谐波成分。通过分析传感器动测头感应信号的处理流程，发现电气部分的随机噪声、零电平波动等问题导致输入数字电路前的方波信号相位改变，从而在测量中引入了电气误差。文中研究了基于差动比较技术的信号处理方法抑制产生的电气误差。通过将该方法应用于精确磁场约束型时栅位移传感器，原始误差下降幅度达30％左右，验证了该方法的可行性与有效性．且对解决相关问题有广泛的适用性．

英文摘要：

Time grating displacement sensor measurement data show that there is a significant error in the higher components.By analyzing the processing flow of the sensor head sensing signal, it was found that the random noise and the zero level fluctuation of the electric part lead to the phase change of the square wave signal before the input digital circuit, and the electrical error was introduced in the measurement.In view of this problem, the differential comparison technique was introduced to restrain the electrical error.The method was used in precise magnetic field constraint grating displacement sensor, and the original error decreased about 30%,the feasibility and validity of the method was verified.And it has wide applicability to solve related problems.