位置：成果数据库 > 期刊 > 期刊详情页
Low-temperature synthesis of AIN films through electron cyclotron resonance plasma adided reactive p
  • 期刊名称：Appl. Phys. A,
  • 时间：0
  • 作者或编辑：3448
  • 第一作者所属机构：复旦大学
  • 页码：2001,73(1),91-95
  • 语言：英文
  • 相关项目：纳米GaN嵌镶薄膜的光发射和光学非线性
作者： 孙剑|吴嘉达|应质峰等|
同期刊论文项目
纳米GaN嵌镶薄膜的光发射和光学非线性
期刊论文 12 会议论文 3 获奖 2
同项目期刊论文
Low-temperature synthesis of nitride films by ECR plasma aided reactiv pulsed laser deposition
ECR等离子体对单晶硅的低温大面积表面处理
用脉冲激光沉积方法制备氮化铝薄膜
Photoluminescence and its time evolution of AIN thin fimls
Formation of CNx thin films by reactive pulsed laser depoition assisted by electron cyclotron resona
氮化铝薄膜的低温沉积
Preparation of AIN films by pulsed laser deposition using sintered aluminum nitride and elemental al
以GaAs为原材料低温制备GaN薄膜
Influences of substrate bias on the composition and structure of carbon nitride thin films prepared
Electron cyclotron resonance plasma assisted reactive pulsed laser deposition of compound films
Electron cyclotron resonance plasma-assisted pulsed laser deposition of boron carbon nitride films