TFT—LCD在制程中会产生亮点、暗点、闪点、碎亮点等常见点缺陷。说明了检测点缺陷的装置、方法和过程。采用ITO隔离、激光炸射等方法对点缺陷进行修复或者淡化,其中ITO隔离法修复或淡化效果显著。修复成功率从45%提升到80%。
The point defects such as bright points, dark points, flash points and broken bright point that often occur in the process of TFT-LCD production are analyzed. The device, method and process of the poinl defects detection are ex- plained. The point defects are detected and repaired by using bomb and ITO insulation. Among them, ITO insulation is most effective in repairing the defects. The success rate of point defects repairing is improved from 450A to 80%.