中文摘要：

针对隔离型压力传感器封装的特点，介绍了波纹膜片的设计过程并利用有限元分析方法对影响波纹膜片性能的主要因素-膜片厚度和波纹深度进行了分析研究，对波纹膜片的结构进行优化，改善了封装有波纹膜片的压力传感器的线性度和灵敏度。

英文摘要：

Aiming at the characteristics of the packaging of isolated pressure sensor, the design process of corrugated diaphragm is introduced and the diaphragm thickness and the corrugation depth, which are the major parameters impacting the performances of corrugated diaphragm, are analyzed by finite elements analysis （FEA）. The structural optimization is achieved and the linearity and sensitivity of the pressure sensor packaged corrugated diaphragms are improved .